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Aluminum nitride, the ideal substrate material

2022-12-19

At present, with the development of the LED industry at home and abroad in the direction of high efficiency, high density, high power, etc., the development of heat dissipation materials with superior performance has become a top priority to solve the LED heat dissipation problem。In general, LED luminous efficiency and service life will decrease with the increase of junction temperature, when the junction temperature reaches more than 125 ° C, LED will even fail。In order to keep the LED junction temperature at a low temperature, it is necessary to use high thermal conductivity, low thermal resistance of the heat dissipation substrate material and reasonable packaging process to reduce the overall packaging thermal resistance of the LED。


Figure 1 LED cooling ceramic substrate

The role of the LED cooling substrate is to absorb the heat generated by the chip and conduct it to the heat sink, so as to achieve heat exchange with the outside world of the chip。Therefore, as an ideal cooling substrate for LED, it must have the following physical properties, chemical properties and electrical properties特性


(1) Good chemical stability and corrosion resistance。

(2) High thermal conductivity, thermal expansion coefficient matched with the chip material。

(3) Low dielectric constant and dielectric loss。

(4) Good electrical insulation and high mechanical strength。

(5) Low price and easy processing。

(6) Small density, non-toxic。

Common substrate materials at this stage areSi, metals (Al, Cu, W, Mo) and metal alloy materials (Cu/W, Cu/Mo), ceramics (Al2O3AlN, SiC, BN) and composite materials, their thermal expansion coefficient and thermal conductivity are shown in Table 1。The cost of Si material is high;The inherent electrical conductivity and thermal expansion coefficient of metal and metal alloy materials do not match the chip materials;Ceramic materials are difficult to process and other shortcomings, it is difficult to meet the various performance requirements of high-power substrate。

Table 1 Thermal expansion coefficient and thermal conductivity of common high-power LED packaging substrates


1

Classification of LED cooling substrate

Power type LED packaging technology has been developed so far, the cooling substrate available for selection is mainlyEpoxy copper-covered substrate (FR-4), metal copper-covered substrate (MCPCB), metal composite substrate (MMC), ceramic copper-covered substrate等。

Epoxy copper-coated substrate (FR-4)It is the most widely used substrate in traditional electronic packaging。It has three functions: support, conduction and insulation。Its main characteristics are: low cost, high hygroscopic resistance, low density, easy to process, easy to realize micro graphics circuit, suitable for large-scale production。However, because the substrate of FR-4 is epoxy resin, the thermal conductivity of organic materials is low, and the high temperature resistance is poor, so FR-4 can not adapt to the requirements of high-density and high-power LED packaging, and is generally only used in low-power LED packaging。

Metal clad Copper substrate (MCPCB)It is a new type of substrate after FR-4。It is made by directly bonding copper foil circuit and polymer insulation layer with metal (Cu, Al) and base with high thermal conductivity through thermal conductive bonding material, as shown in Figure 2。Its thermal conductivity is about 1.12 W/m·K, compared with FR-4 is a large increase。Due to its excellent heat dissipation, MCPCB has become the most widely used product in the current high-power LED cooling substrate market。However, MCPCB also has its inherent disadvantages: the thermal conductivity of the polymer insulation layer is low, only 0.3 W/m·K, resulting in heat can not be transferred directly from the chip to the metal base;The thermal expansion coefficient of Cu and Al is large, which may cause serious thermal mismatch problem。

FIG. 2 Structure diagram of metal base copper-coated substrate (MCPCB)

Metal matrix composite substrate(MMC)The most representative material is aluminum silicon carbide (AlSiC)。Aluminum silicon carbide is a metal matrix composite material that combines the low expansion coefficient of SiC ceramics and the high thermal conductivity of metal Al, which combines the advantages of the two materials and has a low density (2.79g/cm3), low coefficient of thermal expansion, high thermal conductivity, high stiffness and a series of excellent characteristics。The coefficient of thermal expansion of AlSiC can be adjusted by changing the content of SiC to match the coefficient of thermal expansion of adjacent materials, thus minimizing the thermal stress of both。Figure 3 is a schematic diagram of multi-chip packaging with AlSiC as the substrate。


FIG. 3 Schematic diagram of a multi-chip package based on AlSiC

The main common ceramic substrate materials are Al2O3, AlN, SiC, BN, BeO, Si3N4, etc. Compared with other substrate materials, ceramic substrate has the following mechanical properties, electrical properties and thermal properties特点


(1) Mechanical properties。Mechanical strength, can be used as a support component;Good processability, high dimensional accuracy;Smooth surface, no micro cracks, bending and so on。

(2) Thermal properties。The thermal conductivity is large, the thermal expansion coefficient is matched with Si and GaAs chip materials, and the heat resistance is good。

(3) Electrical properties。Low dielectric constant, low dielectric loss, high insulation resistance and insulation damage, stable performance under high temperature and high humidity conditions, high reliability。

(4) Other nature。Good chemical stability, no hygroscopicity;Oil and chemical resistance;Non-toxic, pollution-free, alpha radiation emission is small;The crystal structure is stable, and it is not easy to change in the use temperature range;Abundant raw material resources。

For a long time,Al2O3BeO ceramics are two main substrate materials for high-power packaging。But both substrate materials have inherent drawbacks, Al2O3Low thermal conductivity, thermal expansion coefficient with chip material(e.g. Si) does not match;Although BeO has excellent comprehensive properties, it has high production cost and is highly toxic。Therefore, from the aspects of performance, cost and environmental protection, these two substrate materials can not be used as the most ideal material for the development of high-power LED devices in the future。AlN ceramics have high thermal conductivity, high strength, high resistivity, low density, low dielectric constant, non-toxic, and Si matching thermal expansion coefficient and other excellent properties, will gradually replace the traditional high-power LED substrate materials, become the most promising ceramic substrate materials in the future。


2

Physical properties of aluminum nitride ceramic substrate

Aluminium nitride(AlN) is a synthetic mineral that does not occur naturally in nature。The crystal structure type of AlN is hexagonal wurtzite type, withThe density is small (3.26g/cm3), high strength, good heat resistance (about 3060℃ decomposition), high thermal conductivity, corrosion resistanceEqual advantage。


FIG. 4 Schematic diagram of AlN wurtzite crystal structure

AlN is a strongly covalently bonded compound whose heat transfer mechanism is lattice vibration (i.e. phonon heat transfer).。Due to the small ordinal number of Al and N, AlN has a high thermal conductivity by nature, and its theoretical value can be as high as 319W/m·K。However, in the actual product, because the crystal structure of AlN may be completely evenly distributed, and there are many impurities and defects, as shown in Figure 5, its thermal conductivity is generally only 170-230W/m·K。In the heat conduction process, various defects in the crystal (such as lattice distortion, dislocation, impurities, pores, micro-cracks), grain boundaries, interfaces, second phases, and phonons themselves will interfere with and scatter phonons, thus greatly reducing the thermal conductivity of the substrate。


FIG. 5 Various factors affecting the thermal conductivity of AlN substrate


3

Method for metallization of aluminum nitride ceramic substrate

Since the AlN substrate is not conductive, its surface must be metallized and graphed before it can be used as a high-power LED cooling substrate。However, AlN and metal are two kinds of materials with completely different physical and chemical properties, and the most prominent difference between the two is the different bonding methods of the formation of compounds。AlN is a strong covalent bond compound, and metals generally behave as metal bond compounds, so compared with other chemically bonded compounds, AlN and metal infiltration is poor at high temperatures, and it is difficult to achieve metallization。Therefore, how to achieve the metallization and graphics of the AlN substrate surface has become a crucial issue in the development of high-power LED cooling substrates。At present, the most widely used methods for metallization of AlN substrates are: (1) mechanical connection method, (2) thick film method, (3) active metal brazing method, (4) co-firing method, (5) film method, (6) direct copper coating method。

1

Mechanical connection method

The mechanical connection method is characterized by adopting a reasonable structural design to connect the AlN substrate with the metal, which mainly has two kinds of hot sleeve connection and bolt connection。The mechanical connection method has the characteristics of simple process and good feasibility, but it often produces stress concentration and is not suitable for high temperature environment。

2


Thick film method

Thick film method is by screen printing on the surface of the AlN substrate coated with a layer of conductor paste, sintered to form the lead contact and circuit。Thick film conductor paste is generally made of conductive metal powder (Au, Ag, Cu, etc., with a particle size of 1-5μm), glass binder and organic carrier (including surfactants, organic solvents and thickeners, etc.) by mixing ball milling。The conductive metal powder determines the electrical and mechanical properties of the paste after film formation, the role of the glass binder is to bond the conductive metal powder and the base material and determine the bond strength of the two, and the organic carrier is used as a solvent to mix the metal powder and the binder together。


FIG. 6 Schematic diagram of AlN substrate metallized by thick film method

3

Active metal brazing process

The active metal brazing method is to add some transition elements with relatively active chemical properties such as Ti, Zr, Al, Nb, V and so on to the ordinary brazing metal。At a certain temperature, these active elements will chemically react with the ceramic substrate at the interface to form a reaction transition layer, as shown in Figure 7。The main products of the reaction transition layer are some intermetallic compounds and have the same structure as the metal, so they can be wetted by the melted metal。


FIG. 7 Schematic diagram of bonding interface between AlN substrate and active metal filler metal

4

co-firing

The co-firing method is to brush a thick film slurry of refractory metal (Mo, W, etc.) on the surface of AlN ceramic slices through the screen printing process, and then degreasing and firing together, so that the conductive metal and AlN ceramic become an integrated structure。According to the sintering temperature, the co-firing method can be divided into low temperature co-firing (LTCC) and high temperature co-firing (HTCC) two ways, the sintering temperature of low temperature co-firing substrate is generally 800-900℃, and the sintering temperature of high temperature co-firing substrate is 1600-1900℃。After sintering, in order to facilitate the bonding and welding of the chip leads, a layer of metal with low melting point such as Sn or Ni needs to be plated on the metal position of the cermet complex。

5

Thin film method

The thin film process is metallized on the surface of the AlN substrate by vacuum coating technology。The vacuum coating technology commonly used is ion plating, vacuum evaporation plating, sputtering coating and so on。However, metal and ceramic are two kinds of physical and chemical properties are completely different materials, directly metallized on the surface of the ceramic substrate to obtain the metallized layer of adhesion is not high, and the ceramic substrate and the metal thermal expansion coefficient does not match, in the work will be subjected to large thermal stress。In order to improve the adhesion of metallized layer and reduce the thermal stress between ceramic and metal, ceramic substrate generally adopts multi-layer metal structure。


Figure 8 Multilayer metal AlN ceramic substrate

6

Direct copper coating method

Direct copper coating (DBC) is a metallization method of ceramic surface based on ceramic substrate,The basic principle is: in a weak oxidation environment,The copper surface attached to the ceramic surface is oxidized to form a Cu[O] eutectic liquid phase,The liquid phase has a good wetting effect on the surface of copper and ceramic substrates in contact with each other,In addition, CuAlO2 and other compounds are formed at the interface so that the metal copper can be firmly bonded to the ceramic surface,Realize the metallization of ceramic surface。However, AlN substrate has strong covalent bond, and the adhesion of copper directly covered on its surface is not high, so pretreatment must be done to improve its adhesion with Cu。Generally, the surface is oxidized first to generate a thin layer of Al2O3, through which the connection with metal copper is achieved。


FIG. 9 Direct copper coating process of AlN substrate